Sputtering Target Production Using Melting Methods and Vapor Deposition Materials

Precious Metal Film Formation Methods

Sputtering Target Production Using Melting Methods and Vapor Deposition Materials

We offer high-purity targets and vapor deposition materials.

Precious metal thin films are used in various industrial fields.
We offer high-purity sputtering targets and vapor deposition materials in various shapes and sizes to suit every application.

Targets Manufactured Through Melting,and Vapor Deposition Materials


  • Target materials are free of pinholes, oxides and gases.
  • The quality of bonding with the backing plate is assured through ultrasonic flaw inspection.
  • High-purity precious metal vapor deposition materials are processed into granules, blocks, rods, wires and other forms.
  • Precision cleaned devices and jigs and reprocessed recycled precious metals can also be reprocessed into targets.
  • Grain sizes can be adjusted, from fine to coarse particles, according to your needs.
  • Cylindrical Ag targets with high efficiency


Material Standard items (wt%) High purity items (wt%) Alloys
Gold 99.99 99.999 Au-Si, Au-Zn, Au-Sb, Au-Sn, etc. Carat Au (9K to 18K)
Platinum 99.99
Iridium*1 99.9 99.99
Rhodium*1 99.9 Various alloys
Palladium 99.9
Silver*2 99.99 Various alloys

*1. High melting point materials, such as iridium and rhodium, are dissolved by a method that eliminates oxides, gases and pin holes before they are cast into various target shapes.
*2. Silver alloys with higher environmental resistance (sulfur resistance and humidity resistance) than pure silver metal can be manufactured.

Planar targets

Gold target bonding products
We can support a wide variety of shapes.

Silver-alloy Targets for Reflective Layers and Electrodes


The reflective/recordable layer of DVDs, BDs, and the like, which are constructed of laminated layers including the print layer, protective layer, reflective/recordable layer and resin layer, employs a vapor deposition material. DVD and BD (Blue-ray disks) which are sensitive to direct sunlight, high temperature and humidity use precious metals (reflective films) in the vapor deposition materials for the reflective and recording layers. Product life is determined by the deposited reflective film and poor precision may cause the print or reflective layer to peel off from the edge, or cause the reflective layer to rust due to water intrusion, resulting in a loss of the reflection function or a shorter product life. We offer precious metal targets (silver, silver alloy, etc.) for reflective and permeable films that have excellent environmental resistance.

Comparison between pure silver and TANAKA developed silver alloys

Reflectivity Immediately after Sputtering

Reflectivity Immediately after Humidity Testing (85℃ 95% RH)

Surface Condition (AFM)

  Ag Ag alloy
250℃ 3hr