Probe Pin Materials

Probe Pin Materials

Product image of Probe Pin Materials

Precious metal probe pin materials used in the inspection process of semiconductor manufacturing.

A wide range of precious metal materials are available as probe pins for inspections conducted in the front-end and back-end processes of semiconductor manufacturing.

Application for Probe Pin Materials

Semiconductor integrated circuits are subjected to current-carrying tests at each of the front-end and back-end processes of the manufacturing process.
The current-carrying test in the front-end process is called a wafer test, and a probe card is used. Probe cards use cantilever or vertical probe pins.
The current-carrying test performed in the back-end process is called the final test, and a test socket is used. Pogo pin type probe pins are used for the test sockets.
We offer a lineup of various probe pin materials, as the performance required in terms of mechanical properties such as hardness and bendability, and electrical properties such as electrical resistivity, etc., vary depending on the application.

[Application diagram of Probe Pin Materials] (Front-end-process) Wafer test - cantilever type/vertical type, (Backt-end-process) Final test - Pogo pin type

Types and Features of Probe Pins

Cantilever Type

  • Features: These probe pins are used for probe cards for testing wiring boards with a terminal structure that works on the principle of a cantilever beam. The tip of the probe pin is tapered into a needle shape and bent.
  • Material requirements: Material hardness, linearity, electrical resistivity, bendability, etc.
  • Wire diameter: Φ50~300µm

Vertical Type

  • Features: These are used for probe cards for testing wiring boards with a terminal structure that works on the principle of buckling stress. The tip of the probe pin is processed into a needle or hemispherical shape, depending on the board.
  • Material requirements: Material hardness, linearity, electrical resistivity, bendability, etc.
  • Wire diameter: Φ20~70µm

Pogo Pin Type

  • Features: These are also called spring probes or contact probes. They are used for electric current inspection of ICs, electronic components, and printed circuit boards. The tip is processed into a shape that corresponds to the object to be inspected.
  • Material requirements: Material hardness, linearity, contact resistance, etc.
  • Wire diameter: Φ500µm~1,000µm

Major Materials for Probe Pins

SP-1 SP-2 SP-3 TK-1 TK-H TK-FS TK-SK Sheets
Reference value
Rh Ir
TK-101 TK-FS
Composition
(mass%)
Pd 35 43 40 45 55.8 48.9 55.8
Ag 30 10 40 29.5 19.5 6.9 19.25 10 6.9
Au 10 70
Pt 10 5 0.5
Others Cu, Zn Cu, Ni Cu Cu, others Cu, others Cu, others Cu, others Cu Cu, others Rh Ir
Capable wire
diameter (mm)
0.08-
1.00
0.08-
1.00
0.08-
1.00
0.05-
1.00
0.50-
1.00
0.04-
1.00
0.50-
0.8
Thickness
0.20~0.03
Thickness 0.1 0.03-
0.30
0.03-
0.30
Electrical resistivity
(µΩ·cm, @R.T.)
25.0 13.3 28.3 10.4 10.6 6.8 16.1 2.5 6 4.8 5.6
Electrical
conductivity
(%IACS)
6.9 13.0 6.1 16.6 16.3 25.4 10.7 60-70 24.6 35.9 30.8
Temperature
coefficient
of resistance (ppm)
299 420 542 814 1091 1346 4500 3900
Vickers hardness
(HV)
300-350 300-360 -320 460-490 500-520 400-520 600-640 250-300 400-420 400-550 500-750
Tensile strength
(MPa)
1210-
1450
1210-
1350
1140-
1395
1550-
1750
1470-
1550
1250-
1720
900-
1000
1200 1400-
1800
1700-
3600
Elongation at failure
(%)
1-2 1-2 1-2 2-3 1-2 8-13 1-2 1-2 1-2
Young’s modulus
(GPa)
112 106 119 110 112 150 105 110 380 530
0.2%offset yield strength
(MPa)
1160-
1400
1100-
1250
1410-
1630
1360-
1490
1180-
1640
1150 ~1700 ~3400
Elastic limit
(MPa)
1110-
1170
1050-
1100
900-
1000
1100-
1280
900-
1100
1000-
1500
~1350 ~2900
Elongation at elastic limit
(%)
0.9-
1.3
0.8-
1.0
0.7-
0.9
1.5-
1.7
0.7-
0.9
0.8-
1.1
0.3-
0.6
0.4-
0.6
90°bending times*1
(times)
3-6 3-6 8.5 0-2 0-1 8-10
Remarks ASTM B540
equivalent
Patent
registered
Patent pending Contact TANAKA
for other
thicknesses.
Patent
registered
Patent
registered

*1:Repeated bending times to failure at 0.10mm in dia. (acc. to in-house standard)

The above is just an example, and we can also accommodate compositions not listed here, so please contact us for more information.

*The above are the property values for wire materials. The property values differ between wire and sheet materials.
*Sheet materials can be supplied for TK-FS, SP-1, and TK101. For details, please refer to “Suppliable sheet materials” at the bottom of this page.

Developed material: TK-FS

Low electrical resistivity, high bendability, and a wide range of hardnesses are all achieved simultaneously.

There was no material in our existing products that could simultaneously achieve the three qualities of high hardness, low electrical resistivity, and high bendability, but we have succeeded in solving this problem with this product, making it possible to use the same material for various types of probe pins. This material can be applied to a wide range of probe pin types, such as the cantilever type and the vertical type for wafer testing (front-end process) probe cards.

Features

  • Achieves three qualities simultaneously: Vickers hardness of 500 or more, electrical resistivity of 7.0 µΩ·cm or less, and resistance to bending more than 10 times repeatedly (in-house standard).
  • Our unique processing technology enables adjustment to a wide range of Vickers hardness (400 to 520).
  • Higher elongation (8% to 13%) than TANAKA Kikinzoku Kogyo K.K.’s existing probe pin materials.

Performance of TK-FS (comparison with Major Materials for Probe Pins)

  • Comparison of Major Materials for Probe Pins (Vickers Hardness vs Electrical Conductivity)

    [Comparison graph of performance of probe pins (hardness/conductivity)] TK-FS, etc.

  • Comparison of Major Materials for Probe Pins (Elongation at Failure)

    [Comparison graph of performance of probe pins (elongation at failure)] TK-FS, etc.

  • Comparison of Major Materials for Probe Pins (90° Bending Times)

    [Comparison graph of performance of probe pins (90°bending times))] TK-FS, etc.

  • Features of TK-FS (High Bending Durability)

    Features of TK-FS (High Bending Durability)1

  • Schematic Diagram of Repeated 90° Bending Test

  • Features of TK-FS (High Bending Durability)2

Developed material: TK-SK

Product image of TK-SK

New palladium alloy with a Vickers hardness of 640HV reduces wear-related deformation of probe pins, contributing to longer service life and lower costs for semiconductor test equipment.

Applications

As a palladium alloy for probe pins, TK-SK exhibits maximum hardness of 640HV that makes it suitable for use in test socket applications mainly in the final continuity testing stage (back-end process).

Features

Pogo pin-type probe pins are typically used in test sockets. During testing, the tip or plunger of the probe pin can become deformed due to friction from contact with substrates. Solder may also adhere to the plungers, needing regular cleaning, which further increases the risk of deformation due to friction.

High-hardness probe pins, like TK-SK, reduce wear-related deformation, leading to longer service life and lower maintenance costs for semiconductor test equipment.

Properties (Reference Values)

Physical properties Reference values
Wire diameter range (mm) 0.50-0.8
Melting point (℃) 997℃
Density (g/cm3) 10.52
Vicker’s Hardness 640
Electrical resistivity (µΩ·cm) 16.1
Conductivity (%IACS) 10.7

Hardness comparison between TANAKA probe pin materials and non-precious metal high hardness materials

Comparison of the hardness of TANAKA's probe pin material and non-precious high-hardness metal materials

Hardest TANAKA product, with hardness equivalent to non-precious metal high hardness materials

Suppliable sheet materials

Sheet materials can be supplied for TK-FS, SP-1, and TK101 according to customers’ needs.

Properties

TK-FS (Pd-Ag-Cu) SP-1 (Pd-Ag-Au-Pt-Cu) TK-101 (Cu-Ag)
Density (g/cm3) 10.49 11.90 9.07
Melting Point (℃) 1,100 1,098 780 (Solidus)
Electrical
Resistivity
at R.T. (µΩ・cm)
As-Rolled 25.2 2.5
As-Aged 6
Hardness
Vickers/Surface
(HV)
As-Rolled 300 330
As-Aged 400-420
Tensile Strength/RD (MPa) 1,200 1,100 1,000
Young’s Modulus/RD (GPa) 110 110 105
0.2% proof stress/RD (MPa) 1,150 900

*TK-FS sheet is under development and the property values are only for reference.

Suppliable sheet size

TK-FS (Pd-Ag-Cu) SP-1 (Pd-Ag-Au-Pt-Cu) TK-101 (Cu-Ag)
Thickness (mm) 0.10 0.05 0.20~0.03
Width (mm) 55 62 100
Length (mm) 50~330 50~300 50~330

Warp and waviness shall be acceptable for sample products. Conditions can be discussed upon the customer’s requests.