TANAKA Green Shield
Method of recovering precious metals from vacuum film formation equipment components utilizing nickel plating
This is a new method developed by TANAKA for recovering precious metals, easily detaching PGM sputtered films, including platinum and palladium, by nickel plating on the adhesion-preventing plate of vacuum film formation equipment used in semiconductor manufacturing and other processes.
About TANAKA Green Shield
This cleaning method takes advantage of a unique TANAKA technology related to base plating and applies it to the recycling business. Sputtered films attached to vacuum film formation equipment components—mainly made of stainless steel (SUS)—found in equipment such as sputtering equipment and vacuum deposition equipment are detached, and the precious metals are recovered and refined. The recovered precious metals and precision-cleaned components are then returned to customers.
- Sputtering equipment
- Vacuum film formation equipment
■Features
-
Can detach PGM sputtered films without damaging the base material
By applying a nickel plating to an adhesion-preventing plate in advance, after using the plate, only the nickel plate coating between the adhesion-preventing plate and PGM sputtered film is dissolved. -
High PGM recovery rate
It is expected to reduce recovery loss of precious metals scattered around during the grinding process. -
Reduced environmental impact
It is expected to reduce the amount of cleaning agent required when cleaning equipment.
TANAKA Green Shield jig cleaning process
■Comparison with conventional base preparation
Without thermal sprayed aluminum | With thermal sprayed aluminum | TANAKA Green Shield | |
---|---|---|---|
Film removal method | An abrasive agent is sprayed to remove an adhered film (blast cleaning) | Aluminum coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film | Nickel coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film |
Base preparation | None | Aluminum thermal spraying | Nickel plating |
Types of films that can be cleaned | 〇 | ◎ | ◎ |
Cleaning cost | × | 〇 | ◎ |
Precious metal recovery rate | × | 〇 | ◎ |
Disadvantages |
|
|
The precious metal recycling business provided by TANAKA promotes the recycling of limited precious metal resources and contributes to the realization a circular economy.