TANAKA Green Shield

TANAKA Green Shield

TANAKA Green Shield concept image

Method of recovering precious metals from vacuum film formation equipment components utilizing nickel plating

This is a new method developed by TANAKA for recovering precious metals, easily detaching PGM sputtered films, including platinum and palladium, by nickel plating on the adhesion-preventing plate of vacuum film formation equipment used in semiconductor manufacturing and other processes.

About TANAKA Green Shield

This cleaning method takes advantage of a unique TANAKA technology related to base plating and applies it to the recycling business. Sputtered films attached to vacuum film formation equipment components—mainly made of stainless steel (SUS)—found in equipment such as sputtering equipment and vacuum deposition equipment are detached, and the precious metals are recovered and refined. The recovered precious metals and precision-cleaned components are then returned to customers.

  • Sputtering equipment
    Sputtering equipment
  • Vacuum film formation equipment
    Vacuum film formation equipment

Features

  • Can detach PGM sputtered films without damaging the base material
    By applying a nickel plating to an adhesion-preventing plate in advance, after using the plate, only the nickel plate coating between the adhesion-preventing plate and PGM sputtered film is dissolved.
  • High PGM recovery rate
    It is expected to reduce recovery loss of precious metals scattered around during the grinding process.
  • Reduced environmental impact
    It is expected to reduce the amount of cleaning agent required when cleaning equipment.

TANAKA Green Shield jig cleaning process
Diagram of the TANAKA Green Shield jig cleaning process

Comparison with conventional base preparation

Without thermal sprayed aluminum With thermal sprayed aluminum TANAKA Green Shield
Film removal method An abrasive agent is sprayed to remove an adhered film (blast cleaning) Aluminum coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film Nickel coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film
Base preparation None Aluminum thermal spraying Nickel plating
Types of films that can be cleaned
Cleaning cost ×
Precious metal recovery rate ×
Disadvantages
  • Damage to the surface of the base material leads to reduced lifetime of the base material
  • Loss in precious metal recovery due to scattering
  • Difficult to recover precious metals from uncoated areas
  • High cost of thermal spraying

The precious metal recycling business provided by TANAKA promotes the recycling of limited precious metal resources and contributes to the realization a circular economy.