TANAKA Green Shield
What is "TANAKA Green Shield"?
This is a new method developed by TANAKA PRECIOUS METAL TECHNOLOGIES Co., Ltd. for recovering platinum group metals (PGMs), including platinum and palladium, by enabling the easy detachment of PGM sputtered films through nickel plating on adhesion-preventing plates used in vacuum film formation equipment for semiconductor manufacturing and related processes. By reducing polishing loss, decreasing cleaning agent consumption, and extending component service life, the method contributes to cost reduction and environmental impact reduction.
Method for recovering precious metals from vapor deposition equipment components by nickel plating
This is a new method developed by TANAKA for recovering precious metals, easily detaching PGM sputtered films, including platinum and palladium, by nickel plating on the adhesion-preventing plate of vacuum film formation equipment used in semiconductor manufacturing and other processes.
About TANAKA Green Shield
This cleaning method takes advantage of a proprietary TANAKA`s technology related to base plating and applies it to the recycling business. Sputtered films attached to vacuum film formation equipment components—mainly made of stainless steel (SUS)—found in equipment such as sputtering equipment and vacuum deposition equipment are detached, and the precious metals are recovered and refined. The recovered precious metals and precision-cleaned components are then returned to customers.
Features
- PGM sputtered film can be removed without damaging the substrate
By applying a nickel plating to an adhesion-preventing plate in advance, after using the plate, only the nickel plate coating between the adhesion-preventing plate and PGM sputtered film is dissolved. - High PGM recovery rate
It is expected to reduce recovery loss of precious metals scattered around during the grinding process. - Reducing environmental impact
It is expected to reduce the amount of cleaning agent required when cleaning equipment.
TANAKA Green Shield jig cleaning process
Comparison with conventional base preparation
| Without thermal sprayed aluminum | With thermal sprayed aluminum | TANAKA Green Shield | |
|---|---|---|---|
| Film removal method | An abrasive agent is sprayed to remove an adhered film (blast cleaning) | Aluminum coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film | Nickel coated on the adhesion-preventing plate in advance is dissolved to remove an adhered film |
| Base processing | None | Aluminum thermal spraying | Nickel plating |
| Washable membrane types | 〇 | ◎ | ◎ |
| Cleaning costs | × | 〇 | ◎ |
| Precious metal recovery rate | × | 〇 | ◎ |
| Disadvantages |
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The precious metal recycling business provided by TANAKA promotes the recycling of limited precious metal resources and contributes to the realization a circular economy.
Related Information
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