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Contents
Precious Metals in Front-End Process
Precious Metals in Back-End Process
Environmental & SDGs Contribution
① Front-End Process
Main Applications: Thin film formation, wiring materials, barrier layers
Ru precursors: Used in atomic layer deposition (ALD) for barrier layers and capacitors.
Ru sputtering targets: Used for thin film formation via sputtering.
Evaporation materials (e.g., Au, Pt, Pd): Used for high-purity metal film deposition.
Plating materials (e.g., Au, Ag, Pt): Used for fine wiring and bump formation.
②Back-End Process
1.Backside Processing
・Main Applications: Heat dissipation, electrical connection stability
・Backside evaporation: Uses Au or Pt targets for metal layer deposition.
・Backside plating: Enhances thermal and electrical performance.
2.Assembly
・Main Applications: Die attachment, interconnection, pad formation
・Bonding wire: Au, Ag, or Cu wires used for chip-to-terminal connections.
・Die attach paste:
・General use: Ag-based paste for chip bonding.
・Special use (e.g.,AuRoFUSE): For high-reliability applications.
・Plating: Used as an underlayer for pad formation (e.g., Au, Ni).
Improves durability of wire bonding areas.
3.Testing
・Main Applications: Electrical contact components
・Probe pins: Made from Au or Pd alloys to ensure reliable micro-contact during testing.
Environmental & SDGs Contribution
Recycling & Refining in Semiconductor Manufacturing
Precious metals used in semiconductor manufacturing (e.g., Au, Pt, Pd, Ru) are rare and environmentally intensive to mine. TANAKA Precious Metals promotes sustainability by recovering and refining these materials from production residues and used components.
･Collection targets: Sputtering residues, plating solutions, bonding wires, probe pins, etc.
･Refining: Proprietary technologies ensure ultra-high purity (99.999%+) suitable for semiconductor use
･SDGs contribution
– Goal 12: Circular resource use
– Goal 13: CO₂ reduction through decreased mining
This approach supports the semiconductor industry with stable supply, cost efficiency, and environmental responsibility.
TANAKA DIGITAL SHOWROOM
TANAKA DIGITAL SHOWROOM
