Sputtering Target Production Using Melting Methods and Vapor Deposition Materials
What is "Sputtering Targets and Vapor Deposition Materials" ?
These are high-purity precious metal materials supplied by TANAKA and manufactured using melting processes. They are widely used as sputtering targets and evaporation materials for thin-film formation in semiconductor and optical device applications. Support for sputtering deposition testing is also available. Consistent product quality and a stable supply system form key differentiating factors of TANAKA’s materials.
We offer high-purity targets and vapor deposition materials.
Precious metal thin films are used in a variety of industrial fields, including semiconductors.
We offer high-purity sputtering targets and vapor deposition materials in various shapes and sizes to suit every application.
When considering various materials, we also offer sputtering deposition tests.
Targets Manufactured Through Melting,and Vapor Deposition Materials
Features
- Target material free of defects such as pinholes, oxides, and gases
- Quality assurance system for backing plate bonding rate using ultrasonic flaw inspection
- High-purity precious metal vapor deposition materials are processed into shots, blocks, rods, wires and other forms.
- Refined, recycled precious metals from precision-cleaned equipment and jigs can also be reprocessed into target materials.
- Grain sizes can be adjusted, from fine to coarse, according to your needs.
Types
| Material | Standard items (wt%) |
High purity product (wt%) |
Alloy |
|---|---|---|---|
| Gold | 99.99 | 99.999 | AuSi, AuZn, AuSb, AuSn, etc. Carat Au (K9 to K18) |
| Platinum | 99.99 | - | - |
| Iridium-based*1 | 99.9 | 99.99 | - |
| Rhodium-based*1 | 99.9 | - | Various alloys |
| Palladium | 99.95 | - | - |
| Silver*2 | 99.99 | - | Various alloys |
*1. High melting point materials, such as iridium and rhodium, are melted by a method that eliminates oxides, gases and pin holes before they are cast into various target shapes.
*2 Silver alloys with higher environmental resistance (sulfur resistance and humidity resistance) than pure silver metal can be manufactured.
Gold target microstructure
Responsive to customers’requests, high-quality targets are provided through stable control of structure.
Silver-alloy Targets for Reflective Layers and Electrodes
Features
The reflective/recordable layer of DVDs, BDs, and the like, which are constructed of laminated layers including the print layer, protective layer, reflective/recordable layer and resin layer, employs a vapor deposition material. DVD and BD (Blue-ray disks) which are sensitive to direct sunlight, high temperature and humidity use precious metals (reflective films) in the vapor deposition materials for the reflective and recording layers. Product life is determined by the deposited reflective film and poor precision may cause the print or reflective layer to peel off from the edge, or cause the reflective layer to rust due to water intrusion, resulting in a loss of the reflection function or a shorter product life. We offer precious metal targets (silver, silver alloy, etc.) for reflective and permeable films that have excellent environmental resistance.
Comparison between pure silver and TANAKA developed silver alloy
![[Graph comparing reflectance immediately after sputtering] Comparison with pure silver and silver alloy developed by TANAKA](/jp/products/img/img_sputtering_target_production_using_melting_04.jpg)
Preparing Au-alloy targets and evaluating deposition
Production of Au-alloy targets and test production with depositions can be done.From the deposition samples,etc.,the most suitable material can de determined through quantitative comparisons.
(Implemented in-house)
Please Inquiry
Please feel free Inquiry with any inquiries regarding products, media, competitive funding, etc.