Sputtering Target Production Using Melting Methods and Vapor Deposition Materials
We offer high-purity targets and vapor deposition materials.
Precious metal thin films are used in various industrial fields.
We offer high-purity sputtering targets and vapor deposition materials in various shapes and sizes to suit every application.
We also offer sputtering deposition tests when considering various materials.
Targets Manufactured Through Melting,and Vapor Deposition Materials
Features
- Target materials are free of pinholes, oxides and gases.
- The quality of bonding with the backing plate is assured through ultrasonic flaw inspection.
- High-purity precious metal vapor deposition materials are processed into shots, blocks, rods, wires and other forms.
- Refined, recycled precious metals from precision-cleaned equipment and jigs can also be reprocessed into target materials.
- Grain sizes can be adjusted, from fine to coarse, according to your needs.
Types
| Material | Standard items (wt%) |
High purity items (wt%) |
Alloys |
|---|---|---|---|
| Gold | 99.99 | 99.999 | Au-Si, Au-Zn, Au-Sb, Au-Sn, etc. Carat Au (9K to 18K) |
| Platinum | 99.99 | – | – |
| Iridium-based*1 | 99.9 | 99.99 | – |
| Rhodium-based*1 | 99.9 | – | Various alloys |
| Palladium | 99.95 | – | – |
| Silver*2 | 99.99 | – | Various alloys |
*1. High melting point materials, such as iridium and rhodium, are melted by a method that eliminates oxides, gases and pin holes before they are cast into various target shapes.
*2. Silver alloys with higher environmental resistance (sulfur resistance and humidity resistance) than pure silver metal can be manufactured.
Planar targets
Silver-alloy Targets for Reflective Layers and Electrodes
Features
The reflective/recordable layer of DVDs, BDs, and the like, which are constructed of laminated layers including the print layer, protective layer, reflective/recordable layer and resin layer, employs a vapor deposition material. DVD and BD (Blue-ray disks) which are sensitive to direct sunlight, high temperature and humidity use precious metals (reflective films) in the vapor deposition materials for the reflective and recording layers.
Product life is determined by the deposited reflective film and poor precision may cause the print or reflective layer to peel off from the edge, or cause the reflective layer to rust due to water intrusion, resulting in a loss of the reflection function or a shorter product life. We offer precious metal targets
(silver, silver alloy, etc.) for reflective and permeable films that have excellent environmental resistance.
Comparison between pure silver and TANAKA developed silver alloy
Reflectivity Immediately after Sputtering
![[Graph: Reflectivity Immediately after Sputtering] Silver-alloy Targets for Reflective Layers and Electrodes](https://prod-cms-cache-bucket.s3-ap-northeast-1.amazonaws.com/wp-content/uploads/sites/images/ex/en/products/images/a01/img_block02_01.jpg)
Preparing Au-alloy targets and evaluating deposition
Production of Au-alloy targets and test production with depositions can be done.From the deposition samples,etc.,the most suitable material can de determined through quantitative comparisons.
Film deposited samples using Au target
(Carried out at our company)
Sputter Film La*b* Coordinaters
